Mass flow controller
Kofloc
EX-201S
Applicable gas：N2(Air,H2,He,Ar,O2,CO2,CH4/C.F. input) Full-scale flow rate : 10/30/50/100/300/500SCCM Accuracy：±1%S.P.(＞35%F.S.) ±0.1%F.S.(≦35%F.S.)
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ST-500
Applicable gas：Gas Flow range：Gas 10SCCM～30SLM Accuracy：±1%S.P.(10～100%F.S.) ±0.1%F.S.(2～10%F.S.)
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EX-250S
Applicable gas：N₂,Air,H₂,He,Ar,O₂,CO₂ etc. Flow range：5SCCM～10SLM Accuracy：±1%F.S.
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EX-250S
Applicable gas：N₂,Air,H₂,He,Ar,O₂,CO₂ etc. Flow range：5SCCM～10SLM Accuracy：±1%F.S.
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EX-550
Applicable gas：N₂,Air,H₂,He,Ar,O₂,CO₂ etc. Flow range：10SCCM～5SLM Accuracy：±1%S.P.(25～100%F.S.) ±0.25%F.S.(～25%F.S.)
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MODEL8700
Applicable gas：N₂,Air,H₂,He,Ar,O₂,CO₂ etc. Flow range：10SCCM～100SLM Accuracy：±1～1.5%F.S.
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MODEL3660
Applicable gas：N₂,Air,H₂,He,Ar,O₂,CO₂ etc. Flow range：10SCCM～100SLM Accuracy：±1～1.5%F.S.
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MODEL3200
Applicable gas：N₂,Air,H₂,He,Ar,O₂,CO₂ etc. Flow range：1SCCM～20SLM Accuracy：±1%F.S.
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3810S
Applicable gas：N₂,Air,H₂,He,Ar,O₂,CO₂ etc. Flow range：10SCCM～50SLM Accuracy：±3～5%F.S
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HFC-303
Applicable gas：N₂,Air,H₂,He,Ar,O₂,CO₂ etc. Flow range：100～1000SLM Accuracy：±1%F.S.
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HFM-200W/LS
Low pressure drop large flow rate Mass Flow Meter , Applicable gas：N₂,Air,H₂,He,Ar,O₂,CO₂ etc. Flow range：1500～15000SLM Accuracy：±3～5%F.S.
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FLOWCOMPO
Applicable gas：N₂,Air,H₂,He,Ar,O₂,CO₂ etc. Flow range：1SCCM～20SLM Accuracy：±1%F.S. measuring unit combining the readout unit CR-400B with MFC/MFM.
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CR-400B
Power supply and flow display for MFC/MFM . Easy operation with display. ・Instant and totalized flow indication. ・Alarm setting. ・Valve open/close of mass flow controller, etc. External operation allowed by RS-485 communications and 0-5VDC Input/output signal.
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PSK-FB
Power supply for MFC/ MFM. MODEL PSK-FB SERIES The 1FB,3FB and 6FB types can supply power to 1,3 and 6 systems.
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ACadapter
PSK-83CE available for Model EX-700R series. PSK-85CE available for Model 8700 series. PSK-38DSⅡ available for Model 3810DSⅡ series.
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FCC-3000
This is a compact handy flow control/measuring unit made by combining a compact DIN72 x72 power indicator [CR-400] and MFC/MFM.
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MODEL 3200
Model 3200 Series Mass Flow Controller is an advanced model designed as a successor of the 3910 Series that enjoys a wide use for diverse applications such as manu-facture of semiconductors, LCDs, combustion equipment, analytical devices, and biotechnology fields. Its high per-formance is equal to a new standard of KOFLOC.
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3660
Model 3660 Series Mass Flow Controller has been devel-oped centering the focus on compactness and low cost and is being acclaimed by a wide range of users for di-verse applications, including from laboratory research and development activities to the use as a standard mass flow control model for various types of analyzers and vacuum devices in the production line. Varieties of derived models and options are available.
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DF-550C
DF-550C is now released as an all-metal model of the high-performance digital mass flow controller DF-250C Series. The metal sealed structure enables controlling the measurement of corrosive gases such as semiconductor process gases.
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DF-350C
The Model DF-350 Series is a digital mass flow controller with an integral indicator that operates on a 24-V power supply. It offers features equivalent to the DF-250 Series designed for up to 50 SLM.
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DF-300C
The Model DF-300C Series is a mass flow controller with an integral indicator that operates on a 24-V power supply, as developed in response to the requests from users of the DF Series. It inherits the features of the DF-200C Series with enhanced convenience, including accuracy of ±1% S.P., response ≤1 sec (in all ranges), and the multiple-gas, multiple-range versatility, i.e., support of seven gases (including reference gas) and the ease of changing the flow rate range of each gas.
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DF-250C
The DF-250 series is a high performance digital mass flow controller with ≤1 sec response less than 50SLM specification. The series offers large flow rate line-up up to 300SLM.
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DF-200
The DF-200 series is a high performance digital mass flow controller with ±1%S.P. accuracy and ≤1 sec response. It also has multple-gas and multiple-range function of seven gases and the ease of changing the flow rate range of each gases.
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5100
Model 5100 Series Mass Flow Controller/Meter features weldless structure, metal seals, accurac y of ≤±1%, re-sponse of ≤±1 second and other basic performance con-ditions required for semiconductor process control, and additionally, has achieved a significant price reduction.
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8500-1
This mass fl ow controller/meter driven by a 24 VDC power supply has been developed as a successor to the MODEL8300.
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