Mass flow controller
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EX-201S
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HFM-200W/LS
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PSK-FB
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5100
Model 5100 Series Mass Flow Controller/Meter features weldless structure, metal seals, accurac y of ≤±1%, re-sponse of ≤±1 second and other basic performance con-ditions required for semiconductor process control, and additionally, has achieved a significant price reduction.
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8500-1
This mass fl ow controller/meter driven by a 24 VDC power supply has been developed as a successor to the MODEL8300.
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