Mass flow controller
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5100
Model 5100 Series Mass Flow Controller/Meter features weldless structure, metal seals, accurac y of ≤±1%, re-sponse of ≤±1 second and other basic performance con-ditions required for semiconductor process control, and additionally, has achieved a significant price reduction.
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5400/5410-1
The Model 5400 Series is a successor to the Model 3440, with enhanced basic capabilities. The appearance is similar to the conventional MFC. The sensor drive system is improved: the zero-drift is further reduced and the re-sponse in the lower range is improved. The Model 5410 Series is a mass flow meter with the same body design as that of the 5400 Series.
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D8500-1
This mass flow controller/meter driven by a 24 VDC power supply has been developed as a successor to the MODEL8300.
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8500-1
This mass fl ow controller/meter driven by a 24 VDC power supply has been developed as a successor to the MODEL8300.
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(Options available)