・High accuracy and high response are achieved by the flow sen-sor with temperature-following current difference detection.
・ A normally-closed solenoid valve is employed.
・ A low leak rate is achieved by the weldless structure and metalseal.
・ The dead volume is reduced thanks to the diaphragm seat valve.
・ The face-to-face and body dimensions and the wiring tie-inpoints are designed to facilitate replacement of devices made by other companies.
・Chamber pressure control
・Electronic device manufacturing
・Fuel cell testing
・Gas flow monitoring
・Process flow control
・Solar power element manufacturing
・Secondary calibration reference
・Surface treatment process
・Thermal flame spray
・Thin film manufacturing