High Grade Metal Seal Flow Controllers MODEL 5100 SERIES


Model 5100 Series Mass Flow Controller/Meter features weldless structure, metal seals, accurac y of ≤±1%, re-sponse of ≤±1 second and other basic performance con-ditions required for semiconductor process control, and additionally, has achieved a significant price reduction.


High Grade Metal Seal Flow Controllers

For baking applications on Model 5100B, working temperature is specified up to 80°C.

・High accuracy and high response are achieved by the flow sen-sor with temperature-following current difference detection.
・ A normally-closed solenoid valve is employed.
・ A low leak rate is achieved by the weldless structure and metalseal.
・ The dead volume is reduced thanks to the diaphragm seat valve.
・ The face-to-face and body dimensions and the wiring tie-inpoints are designed to facilitate replacement of devices made by other companies.
Applications・Air sampling
・Analyzer component
・Biotechnological process
・Burn control
・CCFL manufacturing
・Chamber pressure control
・Chemical process
・Environment monitoring 
・Electronic device manufacturing
・Food production
・Fuel cell testing
・Fermentation process
・Gas blending
・Gas distribution
・Gas flow monitoring
・Gas generation
・Industrial furnace
・Leak testing
・Pharmaceutical process
・Pollution monitoring
・Process flow control
・Solar power element manufacturing
・Secondary calibration reference
・Semiconductor process
・Surface treatment process
・Thermal flame spray
・Thin film manufacturing
・Vapor deposition

Mass Flow
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