DF-550C is now released as an all-metal model of the high-performance digital mass flow controller DF-250C Series. The metal sealed structure enables controlling the measurement of corrosive gases such as semiconductor process gases.
・Response improved to 1 sec or faster in all flow rate ranges thanks to a new solenoid
・The stainless steel seal supports high-reactive gases.
・Lineup ranging from 10 SCCM to 10 SLM
・Two communication ports enabling daisy chaining
・RS-485 communication function installed as standard
・RoHS CE standard compliant
*1 The gases must be dry and clean, free of corrosive components and foreign matter such as dust and mist.
*2 The flow rate units SCCM and SLM indicate a mass flow rate converted to a volume flow rate in cc/min and L/min at 0°C and 1 atm.
*3 Guarantee for calibration gas: N2.
*4 Accuracy for calibration gas: N2, flow range (max. full scale).
*5 The operating differential pressure may differ depending on specifications.