Applicable gas:N₂,Air,H₂,He,Ar,O₂,CO₂ etc. Flow range:1SCCM~20SLM Accuracy:±1%F.S.
หมวดหมู่ : Mass Flow (Kofloc) ,  Mass flow controller , 
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Control of minute flows available from F.S.1SCCM by N₂ conversion.
Reduced dead volume thanks to the diaphragm seat valve.