The DF-250 series is a high performance digital mass flow controller with ≤1 sec response less than 50SLM specification. The series offers large flow rate line-up up to 300SLM.
・Standard gases are calibrated with actual gas
・~50SLM model offers fast response of ≤1 sec
・10sccm ~ 300SLM flow range line-up
・Communications functions installed as standard feature(RS485)
・RoHS/CE Standard compliant
*1 The gases must be dry and clean, free of corrosive components and foreign matter such as dust and mist.
*2 The flow rate calibration units SCCM and SLM indicate a mass flow rate converted to a volume flow rate in cc/min and L/min at 0°C and 1 atm.
*3 Guarantee for calibration gas: N2.
*4 Accuracy for calibration gas: N2, flow range (max. full scale).
*5 The operating differential pressure may differ depending on specifications.
*6 Contact us for any other joints.
*7 Exclusive of weight of joint.