The DF-200 series is a high performance digital mass flow controller with ±1%S.P. accuracy and ≤1 sec response. It also has multple-gas and multiple-range function of seven gases and the ease of changing the flow rate range of each gases.
・High accuracy(±1%RD),Fast response(1 sec.max.in all range)
・Multiple ranges and multiple gases supported
・Communications functions installed as standard feature(RS485)
・RoHS/CE Standard compliant
*1 The gases must be dry and clean, free of corrosive components and foreign matter such as dust and mist.
*2 Dedicated software is available to change gases or change the actual full scale (F.S.) within the range of 30 to 100% (30 to 80% for CO2 only) of the
specified full scale.
*3 The flow rate calibration units SCCM and SLM indicate a mass flow rate converted to a volume flow rate in cc/min and L/min at 0°C and 1 atm.
*4 Guarantee for calibration gas: N2.
*5 Accuracy for calibration gas: N2, flow range (max. full scale).
*6 The operating differential pressure may differ depending on specifications.
*7 Contact us for any other joints.
*8 Exclusive of weight of joint.