Low-cost Metal Sealed Mass Flow Controller/Meter MODEL 5400 SERIES

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The Model 5400 Series is a successor to the Model 3440, with enhanced basic capabilities. The appearance is similar to the conventional MFC. The sensor drive system is improved: the zero-drift is further reduced and the re-sponse in the lower range is improved. The Model 5410 Series is a mass flow meter with the same body design as that of the 5400 Series.

Mass Flow

Flow Rate

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Low-cost Metal Sealed Mass Flow Controller/Meter
MODEL 5400 SERIES



 
Features
・ Control and response in each setting range are improved.
・ The following capability to the set voltage is improved (support-ing ramping specifications).
・ As the valve is improved, the control resolution in each range is improved.

Mass Flow
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