Applicable gas:N₂,Air,H₂,He,Ar,O₂,CO₂ etc. Flow range:10SCCM~5SLM Accuracy:±1%S.P.(25~100%F.S.) ±0.25%F.S.(~25%F.S.)
หมวดหมู่ : Mass flow meter ,  Mass Flow (Kofloc) ,  Mass flow controller , 
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Metal seals.
High accuracy(±1% S.P.),Fast response ≦1 sec in all range.
Change of gas type by rotary-switch.
RS485 communication.
0-5VDC or 4-20mA Input/output signal and +/-15VDC or 24VDC power supply.
CE