Mass Flow
Kofloc JP.
DF-250C
The DF-250 series is a high performance digital mass flow controller with ≤1 sec response less than 50SLM specification. The series offers large flow rate line-up up to 300SLM.
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DF-200
The DF-200 series is a high performance digital mass flow controller with ±1%S.P. accuracy and ≤1 sec response. It also has multple-gas and multiple-range function of seven gases and the ease of changing the flow rate range of each gases.
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MODEL RK1500 SERIES
The Model RK1500 Series Flowmeter is equipped with a bellows seal type needle valve so that it can withstand high vacuum, high pressure, high temperature and toxic gases.
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MODEL 1200 SERIES
This is a grade high precision float type flowmeter combined with a needle valve capable of very accurate flow control. It is ideal for measurement and control of minute flows.
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MODEL 1100 SERIES
The flexible flow meter is designed to permit easy disassembly,cleaning, and reassembly. It is ideal for equipment that must be disassembled for maintenance. Users can change the flow meter tube only without changing the block. rota flow
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RK 1000 Series
This is a glass tube float type flowmeter materialized through our all-out effort at streamlining the production line to offer users a low-cost model that can be shipped in a reduced period of delivery. While it is outstandingly compact rota flow
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5100
Model 5100 Series Mass Flow Controller/Meter features weldless structure, metal seals, accurac y of ≤±1%, re-sponse of ≤±1 second and other basic performance con-ditions required for semiconductor process control, and additionally, has achieved a significant price reduction.
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5400/5410-1
The Model 5400 Series is a successor to the Model 3440, with enhanced basic capabilities. The appearance is similar to the conventional MFC. The sensor drive system is improved: the zero-drift is further reduced and the re-sponse in the lower range is improved. The Model 5410 Series is a mass flow meter with the same body design as that of the 5400 Series.
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D8500-1
This mass flow controller/meter driven by a 24 VDC power supply has been developed as a successor to the MODEL8300.
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8500-1
This mass fl ow controller/meter driven by a 24 VDC power supply has been developed as a successor to the MODEL8300.
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