Applicable gas:Gas Flow range:Gas 10SCCM~30SLM Accuracy:±1%S.P.(10~100%F.S.) ±0.1%F.S.(2~10%F.S.)
หมวดหมู่ : Mass Flow (Kofloc) ,  Mass flow controller , 
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PI … Pressure Insensitive(ST-500 only)
Stable control of the gas flow without effect by pressure fluctuations.
Metal seal
DeviceNet® EtherCAT® RS485(ST-550 only) communication
IGS W-seal joint
S.P. accuracy
Responses in 1 sec in the full range of flow control
Multi-range function using a dedicated app(30~100%F.S.)